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ASTM F863

Standard Practice for Detection of Defects in Spin-Coated Resist

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Organization: ASTM
Publication Date: 1 January 1984
Status: inactive
Page Count: 2
scope:

1. Scope

1.1 This practice covers procedure for the detection of defects in spin-coated resist on clear substrates.

1.2 This practice is primarily used for process control and evaluation of spin-coating resist systems.

1.3 This standard does not purport to address all of the safety problems, if any. associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

ASTM F863
January 1, 1984
Standard Practice for Detection of Defects in Spin-Coated Resist
1. Scope 1.1 This practice covers procedure for the detection of defects in spin-coated resist on clear substrates. 1.2 This practice is primarily used for process control and evaluation of...
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