Standard Practice for Detection of Defects in Spin-Coated Resist
|Publication Date:||1 January 1984|
1.1 This practice covers procedure for the detection of defects in spin-coated resist on clear substrates.
1.2 This practice is primarily used for process control and evaluation of spin-coating resist systems.
1.3 This standard does not purport to address all of the safety problems, if any. associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.