DIN 50450-1
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of water impurity in hydrogen, oxygen, nitrogen, argon and helium by using a diphosphorus pentoxide cell
active, Most Current
| Organization: | DIN |
| Publication Date: | 1 August 1987 |
| Status: | active |
| Page Count: | 2 |
| ICS Code (Semiconducting materials): | 29.045 |
| ICS Code (Gases for industrial application): | 71.100.20 |
Document History
DIN 50450-1
August 1, 1987
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of water impurity in hydrogen, oxygen, nitrogen, argon and helium by using a diphosphorus pentoxide cell
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