DIN EN 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2005); German version EN 62047-1:2006
inactive
| Organization: | DIN |
| Publication Date: | 1 October 2006 |
| Status: | inactive |
| Page Count: | 28 |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Electronics (Vocabularies)): | 01.040.31 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
December 1, 2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2016); German version EN 62047-1:2016
In diesem Teil der IEC 62047 sind Begriffe für Bauelemente der Mikrosystemtechnik (MST) einschließlich der Fertigungsprozesse für solche Bauelemente festgelegt
May 1, 2014
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)
In diesem Teil der IEC 62047 sind Begriffe für Bauelemente der Mikrosystemtechnik (MST) einschließlich der Fertigungsprozesse für solche Bauelemente festgelegt.
DIN EN 62047-1
October 1, 2006
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2005); German version EN 62047-1:2006
A description is not available for this item.