UNLIMITED FREE ACCESS TO THE WORLD'S BEST IDEAS

close
Already an Engineering360 user? Log in.

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

Customize Your Engineering360 Experience

close
Privacy Policy

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

ASTM F1621

Standard Practice for Determining the Positional Accuracy Capabilities of a Scanning Surface Inspection System

inactive
Buy Now
Organization: ASTM
Publication Date: 10 February 1996
Status: inactive
Page Count: 8
ICS Code (Semiconducting materials): 29.045
scope:

1. Scope

1.1 This practice covers the determination of the accuracy with which a scanning surface inspection system (SSIS) reports the positions of localized light scatterers on a silicon wafer surface.

1.2 This practice includes procedures to separate the influences of wafer handling and wafer orientation on the precision and bias of the positions reported.

1.3 The procedure must be carried out on an SSIS that is located in a Class M2.5 (Class 10) or better environment as defined in Federal Standard 209E.

1.4 This practice relies on a fabricated silicon reference wafer that contains a prescribed pattern of multiple etched feature fields on its polished (front) surface.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

ASTM F1621
February 10, 1996
Standard Practice for Determining the Positional Accuracy Capabilities of a Scanning Surface Inspection System
1. Scope 1.1 This practice covers the determination of the accuracy with which a scanning surface inspection system (SSIS) reports the positions of localized light scatterers on a silicon wafer...
September 15, 1995
STANDARD PRACTICE FOR DETERMINING THE POSITIONAL ACCURACY CAPABILITIES OF A SCANNING SURFACE INSPECTION SYSTEM
A description is not available for this item.
Advertisement