DS/CLC/R 217-010
Measurement techniques of the reliability test structures of the European mini test chip
inactive, Most Current
| Organization: | DS |
| Publication Date: | 1 April 1998 |
| Status: | inactive |
| ICS Code (Electronic components in general): | 31.020 |
scope:
This document is part of a series of documents describing a technology assessment system cycle of submicron CMOS technologies. The series consists of eight closely related documents (1, 2, 3, 4, 5, 6, 7, 8) in addition to this one.
Document History
DS/CLC/R 217-010
April 1, 1998
Measurement techniques of the reliability test structures of the European mini test chip
This document is part of a series of documents describing a technology assessment system cycle of submicron CMOS technologies. The series consists of eight closely related documents (1, 2, 3, 4, 5,...