Standard Method for Measuring and Counting Particulate Contamination on Surfaces
|Publication Date:||10 May 2000|
|ICS Code (Properties of surfaces):||17.040.20|
This method covers the size distribution analysis of particulate contamination, 5 µm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.
NOTE 1 - For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.