scope:

This Recommended Practice (RP) covers procedures for calibrating and verifying equipment used in characterizing cleanrooms and for determining intervals of calibration. The RP includes general procedures for calibrating photometers, aerosol generators, and anemometers. Where available, references for calibrating other instruments are provided.

BACKGROUND AND PURPOSE

This document was originated to provide calibration and verification procedures for certain instruments used to characterize cleanrooms and for other high-effiency particulate air (HEPA) filtration testing devices. The RP includes informative references for related equipment testing standards and published procedures. Instrument care guidance is available to promote best practices for storage, transportation and use.