ASTM D5127
Standard Guide for Electronic Grade Water
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| Organization: | ASTM |
| Publication Date: | 26 October 1990 |
| Status: | inactive |
| Page Count: | 5 |
| ICS Code (Other products of the chemical industry): | 71.100.99 |
| ICS Code (Water for industrial use): | 13.060.25 |
Document History
January 1, 2013
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as...
January 1, 2013
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as...
June 15, 2012
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as...
April 15, 2007
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Six classifications of water are described, including water for line widths as...
June 10, 1999
Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry
1. Scope 1.1 This guide provides recommendations for water quality related to current electronics and semiconductor industry requirements. 1.2 Water is used for washing and rinsing of semiconductor...
December 10, 1998
Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry
A description is not available for this item.
ASTM D5127
October 26, 1990
Standard Guide for Electronic Grade Water
A description is not available for this item.
October 26, 1990
Standard Guide for Electronic Grade Water
This guide covers the recommendations for the purity of water suitable for use in the electronics and microelectronics industry for purposes such as the washing and rinsing of semiconductor...