AFNOR - NF EN 62047-3
Semiconductor devices - Micro-electromechanical devices - Part 3 : thin film standard test piece for tensile testing
active, Most Current
| Organization: | AFNOR |
| Publication Date: | 1 November 2006 |
| Status: | active |
| ICS Code (Semiconducting materials): | 29.045 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
NF EN 62047-3
November 1, 2006
Semiconductor devices - Micro-electromechanical devices - Part 3 : thin film standard test piece for tensile testing
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