DS/CLC/R 217-001
Basic information on submicron CMOS technology assessment flow
inactive, Most Current
| Organization: | DS |
| Publication Date: | 1 April 1998 |
| Status: | inactive |
| Page Count: | 10 |
| ICS Code (Electronic components in general): | 31.020 |
scope:
The technology assessment flow outlined by this Technical Report and documentated in the related documents (1, 2, 3, 4, 5) intends to establish a common base for test structures, measurement procedures, parameter extraction and verification procedures which are adequate for modern submicron silicon manufacturing technologies. This technology assessment cycle was tested with five CMOS technologies of the JESSI AC 41 project.
Document History
DS/CLC/R 217-001
April 1, 1998
Basic information on submicron CMOS technology assessment flow
The technology assessment flow outlined by this Technical Report and documentated in the related documents (1, 2, 3, 4, 5) intends to establish a common base for test structures, measurement...
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