Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Clean Room Wipers Using Optical and Scanning Electron Microscopy twezst Standard Test Method for
|Publication Date:||10 May 2000|
|ICS Code (Cleanrooms and associated controlled environments):||13.040.35|
This test method covers testing all wipers used in clean rooms and other controlled environments for characteristics related to particulate cleanliness.
This test method includes the use of computer-based image analysis and counting hardware and software for the counting of densely particle-laden filters (see 7.7-7.9). While the use of this equipment is not absolutely necessary, it is strongly recommended to enhance the accuracy, speed, and consistency of counting.
The values stated in SI units are to be regarded as the standard.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.