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ISO 14644-3

Cleanrooms and associated controlled environments Part 3: Test methods

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Organization: ISO
Publication Date: 15 December 2005
Status: inactive
Page Count: 72
ICS Code (Cleanrooms and associated controlled environments): 13.040.35
scope:

This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test apparatus and test procedures for determining performance parameters. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this part of ISO 14644 may be used if based on agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.

This part of ISO 14644 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

Document History

August 1, 2019
Cleanrooms and associated controlled environments — Part 3: Test methods
This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions....
ISO 14644-3
December 15, 2005
Cleanrooms and associated controlled environments Part 3: Test methods
This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests...

References

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