Standard Practice for Producing Spin Coating Resist Thickness Curves
|Publication Date:||25 March 1983|
1.1 This practice covers the procedure for producing spin coating thickness curves for radiation-sensitive resists on wafers, substrates, and mask blanks.
NOTE 1--Several types of thickness-measuring techniques and equipment are available for use in this practice.
1.2 This practice is applicable for resist coating thicknesses from submicrometre to several micrometres.