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ASTM F804

Standard Practice for Producing Spin Coating Resist Thickness Curves

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Organization: ASTM
Publication Date: 25 March 1983
Status: inactive
Page Count: 3
scope:

1. Scope

1.1 This practice covers the procedure for producing spin coating thickness curves for radiation-sensitive resists on wafers, substrates, and mask blanks.

NOTE 1--Several types of thickness-measuring techniques and equipment are available for use in this practice.

1.2 This practice is applicable for resist coating thicknesses from submicrometre to several micrometres.

Document History

ASTM F804
March 25, 1983
Standard Practice for Producing Spin Coating Resist Thickness Curves
1. Scope 1.1 This practice covers the procedure for producing spin coating thickness curves for radiation-sensitive resists on wafers, substrates, and mask blanks. NOTE 1--Several types of...
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