ASTM F1620
STANDARD PRACTICE FOR CALIBRATING A SCANNING SURFACE INSPECTION SYSTEM USING MONODISPERSE POLYSTYRENE LATEX SPHERES DEPOSITED ON POLISHED OR EPITAXIAL WAFER SURFACES
inactive
Buy Now
| Organization: | ASTM |
| Publication Date: | 15 September 1995 |
| Status: | inactive |
| Page Count: | 6 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
February 10, 1996
Standard Practice for Calibrating a Scanning Surface Inspection System Using Monodisperse Polystyrene Latex Spheres Deposited on Polished or Epitaxial Wafer Surfaces
1. Scope 1.1 This practice covers the size calibration of a scanning surface inspection system (SSIS) by observing the distribution of monodisperse polystyrene latex (PSL) spheres that have been...
ASTM F1620
September 15, 1995
STANDARD PRACTICE FOR CALIBRATING A SCANNING SURFACE INSPECTION SYSTEM USING MONODISPERSE POLYSTYRENE LATEX SPHERES DEPOSITED ON POLISHED OR EPITAXIAL WAFER SURFACES
A description is not available for this item.