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ASTM F78

Standard Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards

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Organization: ASTM
Publication Date: 10 December 1997
Status: inactive
Page Count: 6
ICS Code (Semiconductor devices in general): 31.080.01
scope:

1. Scope

1.1 This test method covers a procedure for calibrating a mass spectrometer-type helium leak detector with a series of commercially available calibrated leaks without need for recourse to a primary standard.

1.2 Leak detector parameters determined by this test method include:

1.2.1 Minimum detectable signal, drift noise (8.5, with recorder; 8.6, without recorder),

1.2.2 Response time,

1.2.3 Minimum detectable leak rate, and

1.2.4 Sensitivity.

1.3 This standard does not purport to address the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

December 10, 1997
Standard Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards
This test method covers a procedure for calibrating a mass spectrometer-type helium leak detector with a series of commercially available calibrated leaks without need for recourse to a primary...
ASTM F78
December 10, 1997
Standard Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards
1. Scope 1.1 This test method covers a procedure for calibrating a mass spectrometer-type helium leak detector with a series of commercially available calibrated leaks without need for recourse to a...
January 1, 1979
Standard Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards
A description is not available for this item.
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