BSI - BS EN 62047-21
Semiconductor devices — Micro-electromechanical devices Part 21: Test method for Poisson’s ratio of thin film MEMS materials
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| Organization: | BSI |
| Publication Date: | 31 October 2014 |
| Status: | active |
| Page Count: | 18 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
BS EN 62047-21
October 31, 2014
Semiconductor devices — Micro-electromechanical devices Part 21: Test method for Poisson’s ratio of thin film MEMS materials
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