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DIN EN ISO 14644-14

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO/DIS 14644-14:2014); German version prEN ISO 14644-14:2014

inactive
Organization: DIN
Publication Date: 1 November 2014
Status: inactive
Page Count: 27
ICS Code (Cleanrooms and associated controlled environments): 13.040.35

Document History

January 1, 2017
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016); German version EN ISO 14644-14:2016
Dieser Teil von ISO 14644 legt eine Methodik zur Bewertung der Reinraumtauglichkeit von Geräten (z. B. Maschinen, Messgeräte, Prozessausrüstung, Komponenten und Werkzeuge) für die Anwendung in...
DIN EN ISO 14644-14
November 1, 2014
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO/DIS 14644-14:2014); German version prEN ISO 14644-14:2014
A description is not available for this item.

References

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