AFNOR - NF EN 62047-21
Semiconductor devices - Micro-electromechanical devices - Part 21 : test method for Poisson's ratio of thin film MEMS materials
active, Most Current
| Organization: | AFNOR |
| Publication Date: | 26 December 2014 |
| Status: | active |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
NF EN 62047-21
December 26, 2014
Semiconductor devices - Micro-electromechanical devices - Part 21 : test method for Poisson's ratio of thin film MEMS materials
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