Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
|Publication Date:||15 February 2015|
This guide applies to ultrapure water that is thought to contain
low ppt (parts-per-trillion,
This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples.
This guide does not include recommendations for collecting samples from the water source.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.