scope:

High-Purity/Ultra-High-Purity (HP-/UHP-)media (chemicals and gases) are being used more and more for many production purposes. HP-/UHP-media are supplied for HP-/UHPtechnologies such as semiconductor technology, solar technology, fibre-optics, micro-mechanics and similar branches of industry. The aim is to maintain the level of cleanliness between the point of supply (P.O.S.) and the point of entry (P.O.E. ), or, respectively, to accept a reduction in purity only in certain defined areas where it is permissible.

The purpose of this part of the Guideline is to summarise knowledge regarding the design, construction, operation and monitoring of HP-/UHP-media supply systems. Parts 7 and 9 of this Guideline complement this part of the Guideline. The Guideline should assist designers, system suppliers and users in their work. Cleanliness refers to residual contaminants such as particles, cations, anions, TOC¹) and other specific parameters (foreign gases, humidity etc.). The current safety regulations and recommendations for design, construction and operation of HP-/UHP-media supply systems are not the subject matter of this part of the Guideline. Should comments regarding safety regulations be given in various sections of this part of the Guideline, it is to be noted that such comments are incomplete. This part of the Guideline gives no information concerning cleanliness requirement conditions as these shall be determined by the respective user according to the intended utilisation.

¹) TOC = Total Organic Carbon