scope:

This guideline focuses on the cleanroom-specific energy- saving potentials. The running processes in the cleanroom are considered but at their interfaces with cleanroom-specific building services (ventilating and air-conditioning systems, and process media). In doing so, it is assumed that energy-efficiency criteria for energy-saving use in production have been given utmost consideration in process development, although standardized criteria for comparison (such as energy labels) are not yet available.

By way of example, this guideline examines the saving potentials for ultrapure water and ultrapure steam.

Naturally, the architecture of the building, the building services for the associated controlled environment, the centralised energy supply for the building and all options for heat recovery are also part of an overall energy-performance assessment. However, these aspects having been dealt with comprehensively in existing technical rules (such as VDI 2067, VDI 3807, DIN V 18 599), this guideline will, again, address but the interfaces with the cleanroom.