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ASTM F775

STANDARD TEST METHOD FOR WAFER AND SLICE FLATNESS BY INTERFEROMETRIC, NONCONTACT TECHNIQUE

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Organization: ASTM
Publication Date: 31 October 1988
Status: inactive
Page Count: 7

Document History

ASTM F775
October 31, 1988
STANDARD TEST METHOD FOR WAFER AND SLICE FLATNESS BY INTERFEROMETRIC, NONCONTACT TECHNIQUE
A description is not available for this item.
June 24, 1983
STANDARD TEST METHOD FOR WAFER AND SLICE FLATNESS BY INTERFEROMETRIC, NONCONTACT TECHNIQUE
A description is not available for this item.
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