AFNOR - NF EN 62047-16
Semiconductor devices - Micro-electromechanical devices - Part 16 : test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods
active, Most Current
| Organization: | AFNOR |
| Publication Date: | 14 November 2015 |
| Status: | active |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
NF EN 62047-16
November 14, 2015
Semiconductor devices - Micro-electromechanical devices - Part 16 : test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods
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