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AIHA SEMICONDUCTOR - SEMICONDUCTOR EXHAUST VENTILATION GUIDEBOOK
AIHA
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IEEE SEMICONDUCTOR MEMOR - SEMICONDUCTOR MEMORIES: TESTING AND RELIABILITY
IEEE
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CLEAN AIR ACT - CLEAN AIR ACT
LC
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JIS CLEAN ROOM HDBK - JIS Clean Room Handbook
January 1, 2013 - JSA
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ASTM F1535 - Standard Test Method for Carrier Recombination Lifetime in Silicon Wafers by Noncontact Measurement of Photoconductivity Decay by Microwave Reflectance
June 10, 2000 - ASTM

1. Scope 1.1 This test method covers the measurement of carrier lifetime appropriate to carrier recombination processes in homogeneously doped, polished, n- or p-type silicon wafers with room-temperature resistivity greater than about 0.05 Ω·cm. This test method may also be applied to the...

ASTM F1535-00 - Standard Test Method for Carrier Recombination Lifetime in Silicon Wafers by Noncontact Measurement of Photoconductivity Decay by Microwave Reflectance (Withdrawn 2003)
June 10, 2000 - ASTM International

This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This test method covers the measurement of carrier lifetime appropriate to carrier recombination processes in homogeneously doped, polished, - or -type silicon wafers with room-temperature resistivity greater than about 0.05...

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