Surface chemical analysis — Auger electron spectroscopy — Reporting of methods used for charge control and charge correction
|Publication Date:||15 February 2010|
|ICS Code (Chemical analysis):||71.040.40|
This International Standard specifies the minimum amount of information required for describing the methods of charge control in measurements of Auger electron transitions from insulating specimens by electronstimulated Auger electron spectroscopy and to be reported with the analytical results. Information is provided in Annex A on methods that have been found useful for charge control prior to or during AES analysis. This annex also contains a table summarizing the methods or approaches, ordered by simplicity of approach. Some methods will be applicable to most instruments, others require special hardware, others might involve remounting the specimen or changing it. A similar International Standard has been published for X-ray photoelectron spectroscopy (ISO 19318).