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ISO 17973

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

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Organization: ISO
Publication Date: 1 September 2016
Status: active
Page Count: 18
ICS Code (Chemical analysis): 71.040.40
scope:

This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

Document History

ISO 17973
September 1, 2016
Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying...
October 15, 2002
Surface Chemical Analysis - Medium-Resolution Auger Electron Spectrometers - Calibration of Energy Scales for Elemental Analysis
A description is not available for this item.

References

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