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BSI - BS EN 60204-33

Safety of machinery - Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment

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Organization: BSI
Publication Date: 31 August 2011
Status: active
Page Count: 130
ICS Code (Industrial robots. Manipulators): 25.040.30
ICS Code (Electrical engineering in general): 29.020
ICS Code (Safety of machinery): 13.110

Document History

BS EN 60204-33
August 31, 2011
Safety of machinery - Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment
A description is not available for this item.

References

This document references:
IEC 60695-11-10 - Fire hazard testing – Part 11-10: Test flames – 50 W horizontal and vertical flame test methods
Published by IEC on September 1, 2014
A description is not available for this item.
This document references:
IEC 61032 - Protection of Persons and Equipment by Enclosures - Probes for Verification
Published by IEC on December 1, 1997
A description is not available for this item.
This document references:
61558-2-6 - Safety of transformers, reactors, power supply units and combinations thereof – Part 2-6: Particular requirements and tests for safety isolating transformers and power supply units incorporating safety isolating transformers for general applications
Published by IEC on May 1, 2021
This part of IEC 61558 deals with the safety of safety isolating transformers for general applications and power supply units incorporating safety isolating transformers for general applications....
This document references:
IEC 60947-3 - Low-voltage switchgear and controlgear – Part 3: Switches, disconnectors, switch-disconnectors and fuse-combination units
Published by IEC on April 1, 2020
This part of IEC 60947 applies to switches, disconnectors, switch-disconnectors and fuse-combination units and their dedicated accessories to be used in distribution circuits and motor circuits of...
This document references:
IEC 61558-2-16 - Safety of transformers, reactors, power supply units and similar products for supply voltages up to 1 100 V – Part 2-16: Particular requirements and tests for switch mode power supply units and transformers for switch mode power supply units
Published by IEC on August 1, 2013
This part of IEC 61558 deals with the safety of switch mode power supply units and transformers for switch mode power supply units. Transformers incorporating electronic circuits are also covered by...
This document is referenced by:
K36634 - The Ergonomics Of Workspaces And Machines: A Design Manual
Published by CRC on July 4, 2017
This influential text was fully revised and updated for the second edition with the addition of substantial new material, and takes the reader, in a logical sequence, through the main areas of...
This document is referenced by:
S1191 - Rolling stock specific depot plant and equipment
Published by LUL on July 1, 2019
This standard applies to all London Underground’s staff and suppliers involved in the introduction, operation, maintenance, modification and disposal of LU’s rolling stock specific depot plant and...
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