BSI - 23/30454366 DC
Draft BS EN IEC 62047-45 Semiconductor devices - Micro-electromechanical devices Part 45: Silicon based MEMS fabrication technology-Measurement method of impact resistance of nanostructures
pending, Most Current
| Organization: | BSI |
| Publication Date: | 20 April 2023 |
| Status: | pending |
| Page Count: | 15 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
23/30454366 DC
April 20, 2023
Draft BS EN IEC 62047-45 Semiconductor devices - Micro-electromechanical devices Part 45: Silicon based MEMS fabrication technology-Measurement method of impact resistance of nanostructures
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