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ISO 13424

Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis

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Organization: ISO
Publication Date: 1 October 2013
Status: active
Page Count: 54
ICS Code (Chemical analysis): 71.040.40
scope:

This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

Document History

ISO 13424
October 1, 2013
Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis
This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical...

References

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