Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis
|Publication Date:||1 October 2013|
|ICS Code (Chemical analysis):||71.040.40|
This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.