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ISO 25178-603

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

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Organization: ISO
Publication Date: 1 October 2013
Status: active
Page Count: 36
ICS Code (Properties of surfaces): 17.040.20
scope:

This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometry (PSI) profile and areal surface texture measuring microscopes.

Document History

ISO 25178-603
October 1, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometry (PSI) profile and areal surface texture measuring microscopes.

References

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