ISO - DIS 25178-603
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
pending
| Organization: | ISO |
| Publication Date: | 23 October 2023 |
| Status: | pending |
| Page Count: | 25 |
| ICS Code (Properties of surfaces): | 17.040.20 |
scope:
This document describes the design and metrological characteristics of phase shifting interferometry instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document can be applied to profiling measurements as well.
Document History
DIS 25178-603
October 23, 2023
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
This document describes the design and metrological characteristics of phase shifting interferometry instruments for areal measurement of surface topography. Because surface profiles can be extracted...
October 1, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometry (PSI) profile and areal surface texture measuring microscopes.