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ISO 25178-603

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

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Organization: ISO
Publication Date: 1 October 2013
Status: active
Page Count: 36
ICS Code (Properties of surfaces): 17.040.20
scope:

This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometry (PSI) profile and areal surface texture measuring microscopes.

Document History

DIS 25178-603
October 23, 2023
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
This document describes the design and metrological characteristics of phase shifting interferometry instruments for areal measurement of surface topography. Because surface profiles can be extracted...
ISO 25178-603
October 1, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometry (PSI) profile and areal surface texture measuring microscopes.

References

This document references:
ASME B46.1 - Surface Texture (Surface Roughness, Waviness, and Lay)
Published by ASME on January 1, 2019
This Standard is concerned with the geometric irregularities of surfaces. It defines surface texture and its constituents: roughness, waviness, and lay. It also defines parameters for specifying...
This document references:
ISO 10934-1 - Optics and optical instruments - Vocabulary for microscopy - Part 1: Light microscopy
Published by ISO on December 15, 2002
A description is not available for this item.
This document references:
ISO 10934-2 - Optics and optical instruments - Vocabulary for microscopy - Part 2: Advanced techniques in light microscopy
Published by ISO on March 1, 2007
A description is not available for this item.
This document references:
ISO 14253-1 - Geometrical product specifications (GPS) - Inspection by measurement of workpieces and measuring equipment - Part 1: Decision rules for verifying conformity or nonconformity with specifications
Published by ISO on October 1, 2017
This document establishes the rules for verifying the conformity or nonconformity with a given tolerance for a characteristic of a workpiece (or a population of workpieces) or with a given maximum...
This document references:
ISO 25178-2 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 2: Terms, definitions and surface texture parameters
Published by ISO on April 1, 2012
This part of ISO 25178 specifies terms, definitions and parameters for the determination of surface texture by areal methods.
This document is referenced by:
SN EN ISO 25178-604 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
Published by SNV on October 1, 2013
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3 D mapping of surface height.
This document is referenced by:
ISO 12836 - Dentistry - Digitizing devices for CAD/CAM systems for indirect dental restorations - Test methods for assessing accuracy
Published by ISO on July 1, 2015
This International Standard specifies test methods for the assessment of the accuracy of digitizing devices for computer-aided design/computer-aided manufacturing (CAD/CAM) systems for indirect...
This document is referenced by:
EN ISO 12836 - Dentistry - Digitizing devices for CAD/CAM systems for indirect dental restorations - Test methods for assessing accuracy
Published by CEN on July 1, 2015
This International Standard specifies test methods for the assessment of the accuracy of digitizing devices for computer-aided design/computer-aided manufacturing (CAD/CAM) systems for indirect...
This document is referenced by:
ISO 14999-4 - Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 4: Interpretation and evaluation of tolerances specified in ISO 10110
Published by ISO on August 1, 2015
This part of ISO 14999 applies to the interpretation of interferometric data relating to the measurement of optical elements. This part of ISO 14999 gives definitions of the optical functions and...
This document is referenced by:
ISO 10110-19 - Optics and photonics - Preparation of drawings for optical elements and systems - Part 19: General description of surfaces and components
Published by ISO on August 1, 2015
ISO 10110 specifies the presentation of design and functional requirements for optical elements and systems in technical drawings used for manufacture and inspection. This part of ISO 10110 provides...
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