JSA - JIS C 5630-12
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
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| Organization: | JSA |
| Publication Date: | 20 February 2014 |
| Status: | active |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
JIS C 5630-12
February 20, 2014
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
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