Standard for the Protection of Semiconductor Fabrication Facilities
|Publication Date:||1 January 2018|
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both.
Purpose. This standard is intended to provide reasonable safeguards for the protection of facilities containing cleanrooms from fire and related hazards. These safeguards are intended to provide protection against injury, loss of life, and property damage.