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NFPA 318

Standard for the Protection of Semiconductor Fabrication Facilities

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Organization: NFPA
Publication Date: 1 January 2018
Status: active
Page Count: 40
scope:

This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both.

Purpose. This standard is intended to provide reasonable safeguards for the protection of facilities containing cleanrooms from fire and related hazards. These safeguards are intended to provide protection against injury, loss of life, and property damage.

Document History

NFPA 318
January 1, 2018
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
NFPA 318
January 1, 2015
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
NFPA 318
January 1, 2012
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
NFPA 318
January 1, 2009
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein...
NFPA 318
August 18, 2005
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein...
318
July 19, 2002
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
NFPA 318
July 19, 2002
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
NFPA 318
July 19, 2002
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
NFPA 318
August 18, 2000
Standard for the Protection of Cleanrooms
A description is not available for this item.
NFPA 318
August 5, 1998
Standard for the Protection of Cleanrooms
A description is not available for this item.
NFPA 318
January 1, 1995
Standard for the Protection of Cleanrooms
A description is not available for this item.
NFPA 318
February 10, 1992
STANDARD FOR THE PROTECTION OF CLEANROOMS
A description is not available for this item.
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References

This document references:
NFPA 5000 - Building Construction and Safety Code
Published by NFPA on January 1, 2021
General. The Code addresses those construction, protection, and occupancy features necessary to minimize danger to life and property. Code Title. The provisions of this document shall constitute and...
This document references:
29 CFR PART 1910 - OCCUPATIONAL SAFETY AND HEALTH STANDARDS
Published by DOL on July 1, 2014
Purpose and scope. (a) Section 6(a) of the Williams- Steiger Occupational Safety and Health Act of 1970 (84 Stat. 1593) provides that ‘‘without regard to chapter 5 of title 5, United States Code, or...
This document references:
49 CFR PART 173 - SHIPPERS-GENERAL REQUIREMENTS FOR SHIPMENTS AND PACKAGINGS
Published by DOT on October 1, 2014
Purpose and scope. (a) This part includes: (1) Definitions of hazardous materials for transportation purposes; (2) Requirements to be observed in preparing hazardous materials for shipment by air,...
This document references:
ASME A13.1 - Scheme for the Identification of Piping Systems
Published by ASME on October 7, 2020
OBJECT AND SCOPE This Standard is intended to establish a common system to assist in identification of hazardous materials conveyed in piping systems and the materials’ hazards when released in the...
This document references:
ASME B31.3 - Process Piping
Published by ASME on January 1, 2018
Rules for the Process Piping Code Section B31.31 have been developed considering piping typically found in petroleum refineries; onshore and offshore petroleum and natural gas production facilities;...
This document references:
ASTM E119 - Standard Test Methods for Fire Tests of Building Construction and Materials
Published by ASTM on May 1, 2020
The test methods described in this fire-test-response standard are applicable to assemblies of masonry units and to composite assemblies of structural materials for buildings, including loadbearing...
This document references:
NFPA 5000 - Building Construction and Safety Code
Published by NFPA on January 1, 2021
General. The Code addresses those construction, protection, and occupancy features necessary to minimize danger to life and property. Code Title. The provisions of this document shall constitute and...
This document is referenced by:
ICC I-CODE ORFC - I-Codes: ORFC - Oregon Fire Code
Published by ICC on January 1, 2019
This code establishes regulations affecting or relating to structures, processes, premises and safeguards regarding all of the following: 1. The hazard of fire and explosion arising from the storage,...
This document is referenced by:
ASHRAE CFSP - Design Guide for Cleanrooms Fundamentals, Systems, and Performance
Published by ASHRAE on January 1, 2017
Preface ASHRAE Technical Committee (TC) 9.11 is concerned with HVAC&R systems for cleanrooms and clean spaces, including process, product, and facility air conditioning and related process...
This document is referenced by:
ICC I-CODE IFC - I-Codes: IFC – International Fire Code
Published by ICC on January 1, 2021
This code establishes regulations affecting or relating to structures, processes, premises and safeguards regarding all of the following: 1. The hazard of fire and explosion arising from the storage,...
This document is referenced by:
NFPA 1404 - Standard for Fire Service Respiratory Protection Training
Published by NFPA on January 1, 2018
This standard shall contain minimum requirements for the training component of the Respiratory Protection Program found in NFPA 1500. Purpose. The purpose of this standard shall be to specify the...
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