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NFPA 318

Standard for the Protection of Semiconductor Fabrication Facilities

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Organization: NFPA
Publication Date: 1 January 2015
Status: inactive
Page Count: 35
scope:

This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both.

Purpose. This standard is intended to provide reasonable safeguards for the protection of facilities containing cleanrooms from fire and related hazards. These safeguards are intended to provide protection against injury, loss of life, and property damage.

Document History

318
January 1, 2022
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
NFPA 318
January 1, 2018
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
NFPA 318
January 1, 2015
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
NFPA 318
January 1, 2012
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
NFPA 318
January 1, 2009
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein...
NFPA 318
August 18, 2005
Standard for the Protection of Semiconductor Fabrication Facilities
This standard applies to semiconductor fabrication facilities and comparable research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein...
318 AMD 1
July 17, 2003
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
318 ERTA 2
July 2, 2003
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
318 ERTA 1
February 26, 2003
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
318
July 19, 2002
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
NFPA 318
July 19, 2002
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
NFPA 318
July 19, 2002
Standard for the Protection of Semiconductor Fabrication Facilities
A description is not available for this item.
NFPA 318
August 18, 2000
Standard for the Protection of Cleanrooms
A description is not available for this item.
NFPA 318
August 5, 1998
Standard for the Protection of Cleanrooms
A description is not available for this item.
NFPA 318
January 1, 1995
Standard for the Protection of Cleanrooms
A description is not available for this item.
NFPA 318
February 10, 1992
STANDARD FOR THE PROTECTION OF CLEANROOMS
A description is not available for this item.
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References

This document references:
NFPA 5000 - Building Construction and Safety Code
Published by NFPA on January 1, 2021
General. The Code addresses those construction, protection, and occupancy features necessary to minimize danger to life and property. Code Title. The provisions of this document shall constitute and...
This document references:
ASME A13.1 - Scheme for the Identification of Piping Systems
Published by ASME on October 7, 2020
OBJECT AND SCOPE This Standard is intended to establish a common system to assist in identification of hazardous materials conveyed in piping systems and the materials’ hazards when released in the...
This document references:
ASME B31.3 - Process Piping
Published by ASME on January 1, 2018
Rules for the Process Piping Code Section B31.31 have been developed considering piping typically found in petroleum refineries; onshore and offshore petroleum and natural gas production facilities;...
This document references:
ASTM D5/D5M - Standard Test Method for Penetration of Bituminous Materials
Published by ASTM on May 1, 2020
This test method covers determination of the penetration of semi-solid and solid bituminous materials. The needles, containers, and other conditions described in this test method provide for the...
This document references:
E84 REV D - Standard Test Method for Surface Burning Characteristics of Building Materials
December 1, 2023
This fire-test-response standard for the comparative surface burning behavior of building materials is applicable to exposed surfaces such as walls and ceilings. The test is conducted with the...
This document references:
4910 - Cleanroom Materials Flammability Test Protocol
Published by FM on October 1, 2013
This test standard describes minimum performance requirements for materials which are intended for use in cleanroom facilities. This standard evaluates the ability of the materials to limit fire...
This document references:
NFPA 5000 - Building Construction and Safety Code
Published by NFPA on January 1, 2021
General. The Code addresses those construction, protection, and occupancy features necessary to minimize danger to life and property. Code Title. The provisions of this document shall constitute and...
This document is referenced by:
204 - Standard for Smoke and Heat Venting
Published by NFPA on January 1, 2024
A description is not available for this item.
This document is referenced by:
NFPA 91 - Standard for Exhaust Systems for Air Conveying of Vapors, Gases, Mists, and Particulate Solids
Published by NFPA on January 1, 2020
This standard provides minimum requirements for the design, construction, installation, operation, testing, and maintenance of exhaust systems for air conveying of vapors, gases, mists, and...
This document is referenced by:
NFPA 92 HDBK - Standard for Smoke Control Systems
Published by NFPA on January 1, 2012
This standard shall apply to the design, installation, acceptance testing, operation, and ongoing periodic testing of smoke control systems. Purpose. The purpose of this standard shall be to...
This document is referenced by:
NFPA 55 HDBK - Compressed Gases and Cryogenic Fluids Code Handbook
Published by NFPA on January 1, 2010
Applicability. This code shall apply to the installation, storage, use, and handling of compressed gases and cryogenic fluids in portable and stationary containers, cylinders, equipment, and tanks in...
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