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BSI - BS EN ISO 14644-6

Cleanrooms and associated controlled environments - Part 6: Vocabulary

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Organization: BSI
Publication Date: 31 August 2007
Status: active
Page Count: 48
ICS Code (Cleanrooms and associated controlled environments): 13.040.35
ICS Code (Environment. Health protection. Safety (Vocabularies)): 01.040.13

Document History

BS EN ISO 14644-6
August 31, 2007
Cleanrooms and associated controlled environments - Part 6: Vocabulary
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References

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