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DIN 50989-1

Ellipsometrie - Teil 1: Grundlagen; Text Deutsch und Englisch

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Organization: DIN
Publication Date: 1 March 2018
Status: active
Page Count: 35
ICS Code (Non-destructive testing): 19.100

Document History

DIN 50989-1
March 1, 2018
Ellipsometrie - Teil 1: Grundlagen; Text Deutsch und Englisch
A description is not available for this item.
DIN 50989-1
April 1, 2017
Ellipsometry - Part 1: Principles; Text in German and English
A description is not available for this item.

References

This document references:
ISO/IEC GUIDE 98-3 - Uncertainty of measurement - Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) Supplement 1: Propagation of distributions using a Monte Carlo method TECHNICAL CORRIGENDUM 1
Published by ISO on May 15, 2009
A description is not available for this item.
This document is referenced by:
23216 - Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
Published by ISO on May 1, 2021
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of...
This document is referenced by:
23131 - Ellipsometry — Principles
Published by ISO on April 1, 2021
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...
This document is referenced by:
NEN-ISO 23131 - Ellipsometry - Principles
Published by NEN on May 1, 2021
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...
This document is referenced by:
NEN-EN-ISO 23131 - Ellipsometry - Principles
Published by NEN on November 1, 2022
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...
This document is referenced by:
SN EN ISO 23131 - Ellipsometry - Principles
Published by SNV on November 1, 2022
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...
This document is referenced by:
EN ISO 23131 - Ellipsometry - Principles
Published by CEN on November 1, 2022
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...
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