ISO - 23131
Ellipsometry — Principles
active, Most Current
| Organization: | ISO |
| Publication Date: | 1 April 2021 |
| Status: | active |
| Page Count: | 22 |
| ICS Code (Metrology and measurement in general): | 17.020 |
scope:
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Document History
23131
April 1, 2021
Ellipsometry — Principles
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...