DIN 50989-1
Ellipsometry - Part 1: Principles; Text in German and English
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 March 2018 |
| Status: | inactive |
| Page Count: | 35 |
| ICS Code (Non-destructive testing): | 19.100 |
scope:
This standard deals with ellipsometry, a method for determining optical and dielectric constants in the UV-Vis-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories, preferably for stand-alone measuring systems with special regard to a GUM conforming presentation of the uncertainty of results.
Document History
DIN 50989-1
March 1, 2018
Ellipsometry - Part 1: Principles; Text in German and English
This standard deals with ellipsometry, a method for determining optical and dielectric constants in the UV-Vis-NIR spectral range as well as layer thicknesses in the field of at-line production...
April 1, 2017
Ellipsometry - Part 1: Principles; Text in German and English
Introduction
The ellipsometry measuring method is a phase-sensitive reflection technique using polarized light in the optical far-field. Over a long time, ellipsometry has been established as a...