NEN-ISO 17973
Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
| Organization: | NEN |
| Publication Date: | 1 December 2002 |
| Status: | inactive |
| Page Count: | 22 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainly of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, if used, is 2 eV peak-to peak. It is applicable to those spectrometres equipped with an inert gas ion gun or other method for sample cleaning with an electron gun cable of operating at 4 eV or higher beam energy.
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