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NEN-ISO 17973

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

active, Most Current
Organization: NEN
Publication Date: 1 September 2016
Status: active
Page Count: 21
ICS Code (Chemical analysis): 71.040.40
scope:

NEN-ISO 17973 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

Document History

NEN-ISO 17973
September 1, 2016
Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
NEN-ISO 17973 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces....
December 1, 2002
Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainly of 3 eV, for general analytical use in identifying...
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