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NEN-ISO 17331/A1

Surface chemical analysis - Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

active, Most Current
Organization: NEN
Publication Date: 1 July 2010
Status: active
Page Count: 10
ICS Code (Chemical analysis): 71.040.40

Document History

NEN-ISO 17331/A1
July 1, 2010
Surface chemical analysis - Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
A description is not available for this item.
June 1, 2004
Surface chemical analysis - Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
This International Standard specifies chemical methods for the collection of iron and/or nickel from the surface of silicon-wafer working reference materials by the vapour-phase decomposition method...
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