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IEC 62047-4

Semiconductor devices – Micro-electromechanical devices – Part 4: Generic specification for MEMS

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Organization: IEC
Publication Date: 1 August 2008
Status: active
Page Count: 42
ICS Code (Other semiconductor devices): 31.080.99

Document History

IEC 62047-4
August 1, 2008
Semiconductor devices – Micro-electromechanical devices – Part 4: Generic specification for MEMS
A description is not available for this item.

References

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