scope:

This standard sets performance requirements for wafer carriers used in cleanrooms by evaluating the ability of these products to limit fire spread and smoke damage. All requirements in this standard shall be met in order for these products to be eligible to receive Approval recognition. Wafer carriers that receive Approval recognition do not require special fixed fire protection in and of themselves.

This standard addresses Class 1 classification and the requirements to obtain recognition for situations when the wafer carrier is designed and FM Approved for use anywhere within a cleanroom.

The fire performance and smoke generation requirements contained in the standard are based on storage arrangements and fuel loadings considered to be typical of cleanrooms used in the semiconductor industry. The exposure used to qualify Class 1 wafer carriers is considered to be a fire hazard encountered by wafer carriers in a typical semiconductor fabrication facility.

This standard is not intended to determine the suitability for all end use conditions of a product. Conditions under which wafer carriers are used vary widely. For example, these materials may be subjected to environments, storage arrangements and fuel loadings not anticipated by this standard. In addition, this standard does not evaluate a wafer carrier's process compatibility. It is the responsibility of the manufacturer to determine the suitability of the wafer carrier's process compatibility as it relates to the effects of, but not limited to, outgassing, leaching, extraction and other related process compatibility concerns.

This standard does not address the issue of toxicity or outgassing of the materials when they are subjected to fire conditions nor does it address the capability of the wafer carrier to protect wafers during transport or seismic events.

Purpose

This standard states Approval requirements for wafer carriers used in cleanrooms. Wafer carriers are used by the semiconductor industry to store and transport wafers. The wafer carriers not FM Approved are typically fabricated from materials that may be considered to be a fire hazard and require special protection for potential fire situations.