FM - 4911
Wafer Carriers for Use in Cleanrooms
inactive
| Organization: | FM |
| Publication Date: | 1 December 2002 |
| Status: | inactive |
| Page Count: | 20 |
Document History
April 1, 2010
Wafer Carriers for Use in Cleanrooms
This standard sets performance requirements for wafer carriers used in cleanrooms by evaluating the ability of these products to limit fire spread and smoke damage. All requirements in this standard...
August 1, 2006
Wafer Carriers for Use in Cleanrooms
A description is not available for this item.
4911
December 1, 2002
Wafer Carriers for Use in Cleanrooms
A description is not available for this item.