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BSI - BS ISO 12406

Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of arsenic in silicon

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Organization: BSI
Publication Date: 30 November 2010
Status: active
Page Count: 24
ICS Code (Chemical analysis): 71.040.40

Document History

BS ISO 12406
November 30, 2010
Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of arsenic in silicon
A description is not available for this item.

References

This document references:
BS ISO 5725-2 - Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method
Published by BSI on December 31, 2019
A description is not available for this item.
This document references:
ISO 17560 - Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of boron in silicon
Published by ISO on September 15, 2014
This International Standard specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon, and using stylus...
This document references:
ISO 18114 - Surface Chemical Analysis - Secondary-Ion Mass Spectrometry - Determination of Relative Sensitivity Factors from Ion-Implanted Reference Materials
Published by ISO on April 1, 2003
A description is not available for this item.

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