UNLIMITED FREE
ACCESS TO THE WORLD'S BEST IDEAS

SUBMIT
Already a GlobalSpec user? Log in.

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

Customize Your GlobalSpec Experience

Select Your Free Newsletters

Industry Newsletters

Select Your Free Product Alerts

Finish!
Privacy Policy

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

ISO 21859

Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

active, Most Current
Buy Now
Organization: ISO
Publication Date: 1 June 2019
Status: active
Page Count: 10
ICS Code (Advanced ceramics): 81.060.30
scope:

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

Document History

ISO 21859
June 1, 2019
Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in...

References

This document references:
ISO 18452 - Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer
Published by ISO on November 15, 2005
A description is not available for this item.
This document references:
ISO 3274 - Geometrical Products Specifications (GPS) - Surface Texture: Profile Method - Nominal Characteristics of Contact (Stylus) Instruments
Published by ISO on December 1, 1996
This International Standard defines profiles and the general structure of contact (stylus) instruments for measuring surface roughness and waviness, enabling existing International Standards to be...
This document references:
ISO 4287 - Geometrical Product Specifications (GPS) - Surface Texture: Profile Method - Terms, Definitions and Surface Texture Parameters
Published by ISO on April 1, 1997
This International Standard specifies terms, definitions and parameters for the determination of surface texture (roughness, waviness and primary profile) by profiling methods.
Advertisement