BSI - BS IEC 62047-32
Semiconductor devices — Micro-electromechanical devices Part 32: Test method for the nonlinear vibration of MEMS resonators
active, Most Current
Buy Now
| Organization: | BSI |
| Publication Date: | 31 January 2019 |
| Status: | active |
| Page Count: | 22 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
BS IEC 62047-32
January 31, 2019
Semiconductor devices — Micro-electromechanical devices Part 32: Test method for the nonlinear vibration of MEMS resonators
A description is not available for this item.