IEC 62047-32
Semiconductor devices – Micro-electromechanical devices – Part 32: Test method for the nonlinear vibration of MEMS resonators
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| Organization: | IEC |
| Publication Date: | 1 January 2019 |
| Status: | active |
| Page Count: | 42 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
Document History
IEC 62047-32
January 1, 2019
Semiconductor devices – Micro-electromechanical devices – Part 32: Test method for the nonlinear vibration of MEMS resonators
This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for...