DIN 32564-1
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
inactive
| Organization: | DIN |
| Publication Date: | 1 June 2003 |
| Status: | inactive |
| ICS Code (Precision mechanics): | 39.020 |
| ICS Code (Precision mechanics. Jewellery (Vocabularies)): | 01.040.39 |
Document History
May 1, 2004
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
A description is not available for this item.
DIN 32564-1
June 1, 2003
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
A description is not available for this item.
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